{"title":"压阻式MEMS传感器有限元仿真验证","authors":"D. Benfield, W. Moussa, E. Lou","doi":"10.1109/ICMENS.2005.131","DOIUrl":null,"url":null,"abstract":"The use of finite element analysis to simulate the performance of a piezoresistive sensor is a technique that potentially allows for more efficient design and revision of MEMS devices. By comparing the performance of a FEA pressure sensor to that of an actual device as manufactured allows the capabilities of current simulation software in this field to be examined.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Verifying finite element simulation for a piezoresistive MEMS sensor\",\"authors\":\"D. Benfield, W. Moussa, E. Lou\",\"doi\":\"10.1109/ICMENS.2005.131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The use of finite element analysis to simulate the performance of a piezoresistive sensor is a technique that potentially allows for more efficient design and revision of MEMS devices. By comparing the performance of a FEA pressure sensor to that of an actual device as manufactured allows the capabilities of current simulation software in this field to be examined.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.131\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.131","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Verifying finite element simulation for a piezoresistive MEMS sensor
The use of finite element analysis to simulate the performance of a piezoresistive sensor is a technique that potentially allows for more efficient design and revision of MEMS devices. By comparing the performance of a FEA pressure sensor to that of an actual device as manufactured allows the capabilities of current simulation software in this field to be examined.
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