弱和中等反转的超低电压漏极体连接MOS晶体管

Athanasios Dimakos, M. Bucher, R. K. Sharma, Ilias Chlis
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引用次数: 8

摘要

本文旨在展示超低电压应用的NMOS和PMOS漏极体连接晶体管的基本特性。在180nm CMOS工艺节点上进行了晶圆测量,并对180nm和45nm工艺节点进行了TCAD模拟。给出了弱中压反演的早期电压和本征增益的解析表达式,表明这些量受衬底效应支配,对偏置和几何形状不敏感。此外,分析模型以及EKV3 MOSFET紧凑模型,在适当的参数提取之后,显示出与测量和TCAD模拟数据的密切一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-low voltage drain-bulk connected MOS transistors in weak and moderate inversion
This paper aims to demonstrate the basic characteristics of NMOS and PMOS drain-bulk connected transistors for ultra-low voltage applications. On-wafer measurements were done on 180nm CMOS process, while TCAD simulations were done for 180nm and 45nm technology nodes. Analytical expressions for Early voltage and intrinsic gain in weak-moderate inversion are provided, showing that these quantities are dominated by the substrate effect and are insensitive to bias and geometry. Furthermore, the analytical model as well as the EKV3 MOSFET compact model, following suitable parameter extraction, show a close agreement to measured and TCAD simulated data.
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