S. Schroder, Ozgu Dogan, Jessica Schneidewind, G. Bertotti, S. Keil, H. Gargouri, M. Arens, Evelin Brose, Jurgen Bruns, D. Wolansky, B. Tillack, S. Vassanelli, B. Szyszka, R. Thewes
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Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site multi-channel in-vivo neural interfaces. High uniformity, high areal capacitance, and in particular low leakage current densities are achieved within a sufficiently wide operation voltage window. The results demonstrate the suitability of this process to provide dielectric interfaces for 3D biomedical applications.
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