用于50-/spl μ /g/spl径向/Hz单片CMOS-MEMS电容式加速度计的1mW双斩波放大器

2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers. Pub Date : 2006-06-15 DOI:10.1109/VLSIC.2006.1705311

D. Fang, H. Qu, Huikai Xie

{"title":"用于50-/spl μ /g/spl径向/Hz单片CMOS-MEMS电容式加速度计的1mW双斩波放大器","authors":"D. Fang, H. Qu, Huikai Xie","doi":"10.1109/VLSIC.2006.1705311","DOIUrl":null,"url":null,"abstract":"This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 mum CMOS process. The DCA achieves a 16nV/radicHz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 mug/radicHz down to 5 Hz","PeriodicalId":366835,"journal":{"name":"2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.","volume":"99 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":"{\"title\":\"A 1mW Dual-Chopper Amplifier for a 50-/spl mu/g/spl radic/Hz Monolithic CMOS-MEMS Capacitive Accelerometer\",\"authors\":\"D. Fang, H. Qu, Huikai Xie\",\"doi\":\"10.1109/VLSIC.2006.1705311\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 mum CMOS process. The DCA achieves a 16nV/radicHz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 mug/radicHz down to 5 Hz\",\"PeriodicalId\":366835,\"journal\":{\"name\":\"2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.\",\"volume\":\"99 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-06-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"15\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSIC.2006.1705311\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIC.2006.1705311","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 15

摘要

本文报道了一种用于CMOS-MEMS电容加速度计的新型双斩波放大器(DCA)。采用台积电0.35 mm CMOS工艺制作了集成单轴加速度计的DCA原型机。DCA在20hz时实现16nV/radicHz的输入参考噪声，功耗仅为1mw。测量到的加速度计噪声底值为50 μ g/radicHz至5 Hz

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A 1mW Dual-Chopper Amplifier for a 50-/spl mu/g/spl radic/Hz Monolithic CMOS-MEMS Capacitive Accelerometer

This paper reports a novel dual-chopper amplifier (DCA) for CMOS-MEMS capacitive accelerometers. A DCA prototype integrated with a single-axis accelerometer has been fabricated using TSMC 0.35 mum CMOS process. The DCA achieves a 16nV/radicHz input-referred noise at 20 Hz with a power dissipation of only 1 mW. The measured accelerometer noise floor is 50 mug/radicHz down to 5 Hz

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.

自引率

0.00%

发文量