改性Blech产品在铝基金属化中的应用,以提高电流密度

K. Manning
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引用次数: 1

摘要

一项关于Blech对铝基金属化影响的研究表明,将Blech产物(jL)修改为j2L,可以将短线段的电迁移寿命外推到操作条件。利用这种改进的Blech积计算电流加速度,与Black方程中的n有很好的相关性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The application of a modified Blech product to aluminum-based metallization for increased current density
An investigation into the Blech effect on aluminum-based metallization shows that modifying the Blech product (jL) to j2L allows electromigration lifetimes for short line segments to be extrapolated to operating conditions. The use of this modified Blech product in calculating current acceleration provides good correlation with n from Black's equation.
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