Matlab/SIMULINK中MEMS仿真的不同方法

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) Pub Date : 2018-06-01 DOI:10.23919/MIXDES.2018.8436943

J. Nazdrowicz

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引用次数: 1

摘要

本文在Matlab/SIMULINK环境下实现了MEMS运动传感器的建模和仿真功能。在每个模型中都有不同的应用方法，因此作者提出了数学模型、电学等效模型和物理模型。从所有这些方法得到的结果是相似或相同的，并在这里给出。作者还考虑了这些方法中每个关键的建模方面。

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Different Methods of MEMS Simulations in Matlab/SIMULINK

In this paper there are modelling and simulation capabilities of MEMS motion sensors in Matlab/SIMULINK environment. In each model there is different approach applied, therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from all of them are similar or identical and are presented here. Author also takes into consideration on crucial modelling aspects which in each of these approaches.

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来源期刊

2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES)

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