使用微细电火花加工工具的塑料部件成型

Thirteenth IEEE/CHMT International Electronics Manufacturing Technology Symposium Pub Date : 1992-09-28 DOI:10.1109/IEMT.1992.639879

H. Li, S. Senturia

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引用次数: 3

摘要

我们报告使用微电火花加工(micro- edm)来制造模塑工具，其中塑料零件的模塑尺寸为数十微米。虽然微细电火花加工零件的表面粗糙度存在问题，并且偶尔会遇到成功脱模的问题，但这种微加工方法为制造三维形状提供了比硅微加工或高光刻、电镀和注塑(称为LIGA工艺)的组合更大的灵活性。介绍了利用微细电火花加工成型工具进行微细成型塑料零件的实例。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Molding Of Plastic Components Using Micro-EDM Tools

We report the use of micro electrodischarge machining (micro-EDM) to fabricate molding tools with which plastic pairts are molded having dimensions on the order of tens of microns. While problems are encountered with the surface roughness of the microEDM parts, and occasionally in achieving successful mold-release, this approach to micro fabrication offers the potential of achieving a greater flexibility for fabricating three-dimensional shapes than either silicon micromachining, or the combination of high-aspectratio lithography, electroplating, and injection molding referred to as the LIGA process. Examples of micromolded plastic parts using micro-EDM fabricated molding tools are presented.

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Thirteenth IEEE/CHMT International Electronics Manufacturing Technology Symposium

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