惯性微传感器的设计与制造

1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) Pub Date : 1998-10-21 DOI:10.1109/ICSICT.1998.786512

Guoying Wu, Zhixiong Xiao, Zhihong Li, Y. Hao

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引用次数: 2

摘要

本文主要综述了加速度计和陀螺仪等主要惯性传感器的设计规律和工作原理，以及目前采用的主要微加工技术。介绍了北京大学微电子研究所惯性传感器的主要研究项目。

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Design and fabrication for inertial micro sensors

This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.

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1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)

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