等离子枪台架用毫米波干涉仪的研制

2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO) Pub Date : 2022-10-10 DOI:10.1109/ELNANO54667.2022.9927119

S. Mizrakhy, P. Nesterov, Igor Nesterov, V. Bezborodov, D. Vinnikov, V. Yuferov

{"title":"等离子枪台架用毫米波干涉仪的研制","authors":"S. Mizrakhy, P. Nesterov, Igor Nesterov, V. Bezborodov, D. Vinnikov, V. Yuferov","doi":"10.1109/ELNANO54667.2022.9927119","DOIUrl":null,"url":null,"abstract":"Millimeter-wave interferometer has been developed and preliminarily studied for the stand with a plasma gun. The high-density plasma can exist in the developed plasma stand using arc discharge at the vacuum chamber. Such techniques are used for plasma processing in the manufacturing and material sciences. Quasioptical antennas as well as sealing and structural elements for their installation inside plasma gun ports have been developed. The tests of the developed interferometer and antennas were performed.","PeriodicalId":178034,"journal":{"name":"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Millimeter Wave Interferometer Development for the Stand with Plasma Gun\",\"authors\":\"S. Mizrakhy, P. Nesterov, Igor Nesterov, V. Bezborodov, D. Vinnikov, V. Yuferov\",\"doi\":\"10.1109/ELNANO54667.2022.9927119\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Millimeter-wave interferometer has been developed and preliminarily studied for the stand with a plasma gun. The high-density plasma can exist in the developed plasma stand using arc discharge at the vacuum chamber. Such techniques are used for plasma processing in the manufacturing and material sciences. Quasioptical antennas as well as sealing and structural elements for their installation inside plasma gun ports have been developed. The tests of the developed interferometer and antennas were performed.\",\"PeriodicalId\":178034,\"journal\":{\"name\":\"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ELNANO54667.2022.9927119\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELNANO54667.2022.9927119","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

研制了毫米波干涉仪，并对该干涉仪进行了初步研究。在真空室采用电弧放电，可使高密度等离子体存在于所研制的等离子体架中。这些技术被用于制造和材料科学中的等离子体处理。准光学天线及其安装在等离子枪端口内的密封和结构元件已经开发出来。对研制的干涉仪和天线进行了测试。

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Millimeter Wave Interferometer Development for the Stand with Plasma Gun

Millimeter-wave interferometer has been developed and preliminarily studied for the stand with a plasma gun. The high-density plasma can exist in the developed plasma stand using arc discharge at the vacuum chamber. Such techniques are used for plasma processing in the manufacturing and material sciences. Quasioptical antennas as well as sealing and structural elements for their installation inside plasma gun ports have been developed. The tests of the developed interferometer and antennas were performed.

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2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)

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