Study of integrated nonlinear optical devices based on chalcogenide layers

Chalcogenide films are deposited by radio frequency (RF) magnetron sputtering on different cladding layers (thermally oxidized silicon and selenide-based materials). Ridge waveguides and micro-ring resonators are then processed using photolithography and dry etching techniques. Nonlinear effects from these devices (self-phase modulation and four-wave mixing) are experimentally demonstrated. From these results, a theoretical study is developed to design nonlinear photonic structures to demonstrate optical parametric oscillations, tunable microwave signal generation on optical carrier, supercontinuum generation or Brillouin scattering.