采用对称弹簧设计改进两轴径向-垂直组合驱动扫描仪的性能

T. Hsieh, Yao-tien Chang, Sheng-jie Chiou, J. Tsai, D. Hah, M. Wu
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引用次数: 1

摘要

采用对称横杆弹簧结构,提高了径向垂直组合驱动两轴无平衡微镜的性能。执行器隐藏在镜子下面,以尽量减少设备的外形因素。该装置采用SUMMiT-V表面微加工工艺制造。整个改进的横杆弹簧结构采用同一层厚度为1 μ m的结构,并缩短扭转弹簧以抑制横向失稳。机械旋转角度分别为plusmn5.33°(50.7 V)和plusmn6.04°(52.8 V),分别围绕x轴和y轴旋转。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design
A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.
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