大非共振位移并联板MEMS反射镜设计

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879642

S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller

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引用次数: 10

摘要

我们提出了一种位移为65 /spl mu/m的静电驱动MEMS反射镜。这种设计提供了一个2毫米方形的反射表面，易于制造，使其适用于广泛的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Parallel-plate MEMS mirror design for large on-resonance displacement

We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.

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来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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