基于90纳米CMOS工艺的数字像素成像仪中的器件失配和随机电报信号

C. Rizk, P. Julián, A. Pasciaroni, H. Radhakrishnan, J. Wilson, P. Pouliquen
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引用次数: 0

摘要

随着像素间距越来越小,对读出电路中更多数字处理和功能的兴趣和需求继续快速增长,这一趋势将从可见光持续到长波红外。对于全数字设计(即像素内的a /D),根据工艺特征大小、有效井容量(绝对动态范围)和像素内功能,数字电路可能会占用很大一部分可用空间。优点是数字电路可随工艺节点缩放。缺点是限制了像素的模拟(前端)部分的可用空间,限制了具有较小特征尺寸的CMOS工艺的设计。正如我们之前报道的55纳米和65纳米设计一样,本文展示了用90纳米工艺制造的两个成像仪的结果。除了随机电报信号/噪声(RTS/N)外,本文还比较了两种设计之间的不均匀性,其中器件不匹配是罪魁祸首。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Device Mismatching and Random Telegraph Signal In Digital Pixel Imagers On 90-nm CMOS Process
The interest and need for more digital processing and functionality in the readout circuits continue to grow rapidly while the pixel pitch is getting smaller and this trend continues from visible to long wave IR. For a fully digital design (i.e. A/D in the pixel), the digital circuit can consume a large portion of the available space depending on the process feature size, effective well capacity (absolute dynamic range), and in-pixel functionality. The upside is that the digital circuit scales with the process node. The down side is limiting available space for the analog (front end) portion of the pixel limiting the designs to CMOS processes with smaller feature size. As we previously reported on 55- and 65-nm designs, this paper shows results from two imagers fabricated on the 90-nm process. In addition to Random Telegraph Signal/Noise (RTS/N), this paper compares non-uniformity between the two designs with device mismatching being the main culprit.
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