O. Mironov, P. Phillips, Evan H. C. Parker, M. Mironov, V. Gnezdilov, V. Ushakov, V. Eremenko
{"title":"mbe生长未掺杂Si- si0.78 ge0.22 /(001)Si超晶格的椭圆偏振和拉曼光谱","authors":"O. Mironov, P. Phillips, Evan H. C. Parker, M. Mironov, V. Gnezdilov, V. Ushakov, V. Eremenko","doi":"10.1117/12.280430","DOIUrl":null,"url":null,"abstract":"Spectroscopic ellipsometry and Raman spectroscopy have ben sued to characterize Si/Si0.78Ge0.22 superlattices grown by molecular beam epitaxy at different substrate temperatures, 550 degrees C < Ts < 810 degrees C. The result are interpreted to give information on material and interface quality, layer thicknesses, and state of strain, and are in good agreement with XRD, SIMS and RBS investigations. The observed frequencies of zone-folded longitudinal acoustic phonons in a high quality sample agree well with those calculated using Rytov's theory of acoustic vibrations in layered media.","PeriodicalId":276773,"journal":{"name":"Material Science and Material Properties for Infrared Optics","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ellipsometry and Raman spectroscopy of MBE-grown undoped Si-Si0.78Ge0.22/(001)Si superlattices\",\"authors\":\"O. Mironov, P. Phillips, Evan H. C. Parker, M. Mironov, V. Gnezdilov, V. Ushakov, V. Eremenko\",\"doi\":\"10.1117/12.280430\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Spectroscopic ellipsometry and Raman spectroscopy have ben sued to characterize Si/Si0.78Ge0.22 superlattices grown by molecular beam epitaxy at different substrate temperatures, 550 degrees C < Ts < 810 degrees C. The result are interpreted to give information on material and interface quality, layer thicknesses, and state of strain, and are in good agreement with XRD, SIMS and RBS investigations. The observed frequencies of zone-folded longitudinal acoustic phonons in a high quality sample agree well with those calculated using Rytov's theory of acoustic vibrations in layered media.\",\"PeriodicalId\":276773,\"journal\":{\"name\":\"Material Science and Material Properties for Infrared Optics\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Material Science and Material Properties for Infrared Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.280430\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Material Science and Material Properties for Infrared Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.280430","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ellipsometry and Raman spectroscopy of MBE-grown undoped Si-Si0.78Ge0.22/(001)Si superlattices
Spectroscopic ellipsometry and Raman spectroscopy have ben sued to characterize Si/Si0.78Ge0.22 superlattices grown by molecular beam epitaxy at different substrate temperatures, 550 degrees C < Ts < 810 degrees C. The result are interpreted to give information on material and interface quality, layer thicknesses, and state of strain, and are in good agreement with XRD, SIMS and RBS investigations. The observed frequencies of zone-folded longitudinal acoustic phonons in a high quality sample agree well with those calculated using Rytov's theory of acoustic vibrations in layered media.
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