Yang Zhou, Ling Xu, Miaocao Wang, Z. Qian, Sheng Liu
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引用次数: 3
摘要
绝缘栅双极晶体管(IGBT)模块翘曲是由于材料的不匹配和结构的不对称导致的,几乎在每个封装过程中都不可避免。在回流过程中会产生高水平的翘曲和热应力,影响IGBT的可靠性。预翘曲基材方法已作为工业实践用于减少回流引起的翘曲。该方法仍面临低成本和工艺简化的挑战。随着铜键合技术的发展,集成基板(integrated base plate, IBP)技术被用于减少翘曲。然而,这种方法并不划算。本文提出了一种低成本、简单的将DBC板嵌入铜衬底的方法,作为减少翘曲的替代方案。选择1200V的IGBT模块原型对翘曲减少方法进行基准测试。采用粘塑性焊料模型和大变形理论的有限元方法对焊料回流过程进行了研究。对SAC305焊料层采用了模拟焊料粘塑性行为的有限元工具中的一个and本构模型。采用先进的元件“死亡活化”技术模拟了整个回流过程。采用先进的有限元分析方法,研究了三种减少翘曲的封装装配方法。有限元分析结果表明,该方法可以有效地将IGBT模块的翘曲量降低到工业可接受的水平。
A new method for reducing warpage due to reflow in IGBT module
Warpage in Insulated Gate Bipolar Transistor (IGBT) module is induced by the unavoidable mismatch of materials and asymmetric structure in almost every packaging process. The high level of warpage and thermal stress is introduced during reflow processes, which can impact the IGBT reliability. Pre-warping substrate method has been used as industry practice for reducing warpage due to reflow. The method still faces challenges of low cost and process simplification. With the development of copper bonding technique, IBP (Integrate base plate) was recently developed for reducing the warpage. However, the method is not cost-effective. In this paper, a low-cost and simple method of embedding DBC plates into copper substrate has been proposed as alternative solution for the warpage reduction. A 1200V IGBT module prototype was selected for benchmarking the warpage reduction methods. Finite element method with viscoplastic solder model and large deformation theory was used to investigate the solder reflow process. Anand constitutive model available in FEM tools for modeling the viscoplastic behaviors of solder materials was used for SAC305 solder layers. The whole reflow process was simulated by advanced element “death and activation” technique. Three package assembly methods for reducing warpage were investigated by advanced finite element analyses. The FEA result shows that the proposed new method can effectively reduce the warpage of IGBT module to industry-acceptable level.