应用于场发射束的纳米/微电子场发射器的研究

2016 3rd International Conference on Green Technology and Sustainable Development (GTSD) Pub Date : 2016-11-01 DOI:10.1109/GTSD.2016.52

W. Lin, Chao-Kai Yang, T. Cheng

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引用次数: 0

摘要

本文对纳米/微电子场发射体的仿真和实验进行了研究。结果表明，由于电荷粒子对纳米发射极的屏蔽作用，发射电子产生的空间电荷效应对确定纳米发射极的场致发射电流具有重要意义。此外，从我们的FE模型结果来看，将FE纳米三极管的发射极半径和栅极孔径缩小到更小的尺寸将降低工作电压并克服空间电荷效应。此外，我们还通过MPCVD生长了排列良好的MWCNTs，并与热CVD生长的随机MWCNTs进行了比较。结果表明，排列良好的碳纳米管场发射材料具有稳定的场发射性能，其中开孔硫化排列良好的碳纳米管场发射材料表现出最好的场发射效果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The Study of Nano/Micro Electron Field Emitters for Field Emission Beam Applications

The simulation and experiment of nano/micro electron field emitters were investigated in this paper. The results indicated that the space-charge effect due to the emitted electrons is important in determining the field-emission current from a nano-emitter because of the shielding effect from the charge particles. Besides, from our FE model results, scaling the emitter radius and gate aperture of FE nanotriodes to smaller dimensions will lower the operating voltage and overcome the space-charge effects. Moreover, we also grow the well aligned MWCNTs by MPCVD to compare with the random MWCNTs by Thermal CVD. The results presented that well-aligned will induced the stable field emission properties and the open thiolated well-align carbon nanotube field emitter showed the best field emission results.

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来源期刊

2016 3rd International Conference on Green Technology and Sustainable Development (GTSD)

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