T. Hsieh, P. Chiu, Yu-Chuan Liu, N. Yeh, W. Ho, J. Chyi
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Selective growth of InAs quantum dots on patterned GaAs substrate by metal-organic chemical vapor deposition
In this paper, we demonstrate quantum dots (QDs) on nano-scale mesa using wet chemical etching and epitaxial growth process on Si-doped GaAs substrates.