用于微光机械结构的直接图像化厚膜杂化玻璃材料

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879651

J. Rantala, S. Juuso, R. Levy, L. Kivimaki, M. Descour

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引用次数: 0

摘要

采用液相沉积和直接紫外刻写的方法在光敏杂化玻璃材料中制备光学和机械结构。为实现微光学工作台，制备了高光学质量的厚膜和结构。

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Directly patternable thick film hybrid glass materials for micro-opto-mechanical structures

The liquid phase deposition and direct UV writing method is applied for the fabrication of optical and mechanical structures into a photosensitive hybrid glass material. High optical quality thick films and structures are fabricated for the realization of a micro-optical table.

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来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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