靠近静电不稳定性的宽带浅滩机械放大器的传递函数调谐

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-18 DOI:10.1109/TRANSDUCERS.2017.7994170

V. Maiwald, Y. Chen, M. Müller, I. Flader, C. Roman, D. Heinz, D. D. Shin, T. Kenny, C. Hierold

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引用次数: 2

摘要

提出了一种可调谐宽带浅滩机械放大器，并提出了一种扩展其在静电拉入不稳定附近工作的方法。该模型已在真空封装硅MEMS器件上进行了实验验证。我们表明，通过添加适当的机械补偿弹簧，放大器可以以准线性方式在拉入不稳定性附近工作。此外，还给出了静电带通区域和放大调谐。

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Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability

We present a tunable broadband shoaling mechanical amplifier and a method to extend its operation near the electrostatic pull-in instability. The model has been verified experimentally on a vacuum encapsulated silicon MEMS device. We show that by adding an appropriate mechanical compensation spring, the amplifier can be operated near the pull-in instability in a quasi-linear fashion. Furthermore, electrostatic band-pass region and amplification tuning is shown.

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来源期刊

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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