带电薄膜和球面电极之间的高速静电表面放电,球面电极上有或没有薄介电膜

T. Oda, Y. Sakai
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引用次数: 0

摘要

观察了导电平板电极上的带电薄介电膜与与平板相连的球体电极之间的静电表面放电(ESD),球体电极被未带电的薄介电膜或金属覆盖。记录放电电流波形、放电间隙长度、电流上升时间、放电照片、电流峰值等。射线或紫外光照射产生的初始电荷并不明显,因此静电放电实验的再现性没有得到很大提高。随着介质膜厚度的增加,表面静电放电对电荷极性的依赖性变小。当电极上有12.5 μ m的不带电膜时,放电间隙长度减少到带电膜与球形金属电极之间的50 - 70%。这种ESD的峰值电流和转移电荷值也降低到薄膜和电极之间的大约三分之一。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High speed electrostatic surface discharge between a charged thin film and a sphere electrode with or without a thin dielectric film on that
The electrostatic surface discharge (ESD) between a charged thin dielectric film on a conductive flat plate electrode and a sphere electrode that is connected to the plate, and is either covered with an uncharged thin dielectric film or fare, was observed. Discharge current waveform, discharge gap length, current risetime, discharge photographs, current peak value, etc. were recorded. The initial charge generation by irradiation with beta-rays or ultraviolet light was not readily apparent, so that the reproducibility of ESD experiments was not much improved. The charging polarity dependence of such a surface ESD between two dielectric films becomes small with increasing film thickness. The discharge gap length of an ESD with an 12.5 mu m uncharged film on the electrode reduces to 50 or 70% of that between a charged film and a sphere metal electrode. Peak current and transferred charge value of such an ESD also decreases to roughly one-third of that between the film and the electrode.<>
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