功率mosfet辐照缺陷的退火

E. Bendada, A. Malaoui, M. Mabrouki, K. Quotb, K. Rais
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引用次数: 2

摘要

实验了一种创新的器件表征方法来验证功率mosfet的退火伽玛射线损伤。给出了在剂量率为103.8 rad.mn-1时体漏结结构参数的退化。讨论并分析了在100℃下的温度退火效应对捕获氧化物密度和界面电荷的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Annealing of Irradiated-Induced defects in power MOSFETs
An innovative method of device characterization is experimented to qualify annealing Gamma-ray damage in power MOSFETs. The degradation of structural parameters of the body-drain junction for a dose rate of 103.8 rad.mn-1 is presented. Temperature annealing effects, at 100°C, are discussed and analyzed against the evolution of the density trapped oxide and interface charges.
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