用于OCT内窥镜的聚苯乙烯铰链慢扫描光学扫描仪的设计与制造

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607822

M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

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摘要

本文报道了一种基于SOI-MEMS工艺技术的新型聚苯乙烯铰链静电光学扫描仪的设计和制造方法。聚对二甲苯是cvd加工的有机材料，具有弹性常数小、化学稳定性高的特点，适合制作低谐振频率的低压MEMS扫描仪。

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Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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