去耦脊绝缘结构用于杂化GaInAsP/SOI脊波导激光器的低热阻研究

Moataz Eissa, T. Kikuchi, Y. Ohiso, T. Amemiya, N. Nishiyama
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引用次数: 0

摘要

低热阻混合GaInAsP/SOI脊波导法布里-珀罗激光器。采用了新型脊状保温结构,提高了散热效果。即使在氧化层厚度为$3.0-\mu \ mathm {m}$的SOI上,在2 mm空腔长度下也显示出创纪录的低热阻14.3 K/W。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low-thermal-resistance by Decoupled Ridge Insulation Structure for hybrid GaInAsP/SOI ridge-waveguide lasers
Low-thermal-resistance hybrid GaInAsP/SOI ridge-waveguide Fabry-Perot lasers were demonstrated. Novel ridge-insulation structure was introduced to enhance heat dissipation. Record low thermal resistance of 14.3 K/W were demonstrated at 2-mm-cavity length even on SOI with $3.0-\mu \mathrm{m}$-thick oxide layer.
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