偏振稳定表面蚀刻vcsel的设计与建模

IEEE 18th International Semiconductor Laser Conference Pub Date : 2002-12-10 DOI:10.1109/ISLC.2002.1041096

H. Unold, P. Debernardi, R. Michalzik, F.K. Khan, K. Ebeling

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引用次数: 1

摘要

我们成功地制造并模拟了具有高单模偏振稳定性的椭圆表面蚀刻氧化物约束vcsel。从我们的结果来看，两个可能的极化方向似乎是由氧化过程中的各向异性决定的，但可以通过蚀刻椭圆的方向来选择。研究不同的镜面反射率和更精细变化的椭圆形状将导致最佳性能的设计规则。

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Design and modeling of polarization-stable surface-etched VCSELs

We have successfully fabricated and modeled elliptically surface-etched oxide confined VCSELs for high single-mode polarization-stable operation. From our results, the two possible polarization directions seem to be determined by anisotropies in the oxidation process but can be selected by the orientation of the etched ellipse. Investigations with different mirror reflectivities and more finely varied ellipse shapes will lead to design rules for optimum performance.

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IEEE 18th International Semiconductor Laser Conference

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