溶胶-凝胶法处理动态随机存取存储器用SrTiO/ sub3 /薄膜

9th International Symposium on Electrets (ISE 9) Proceedings Pub Date : 1996-09-25 DOI:10.1109/ISE.1996.578192

Qing-Feng Liu, Xin-Shan Li, Z. Meng

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引用次数: 0

摘要

以醋酸锶和四氧化二钛为原料，采用溶胶-凝胶法制备了钛酸锶(SrTiO/sub 3/)多晶无裂纹薄膜。在600℃以上热处理的薄膜中，x射线衍射分析发现钙钛矿相为非晶相。

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Sol-gel processing SrTiO/sub 3/ thin films for dynamic random access memory applications

Polycrystalline and crack-free strontium titanate (SrTiO/sub 3/) thin films were deposited on silicon and quartz substrates by the sol-gel technique, using strontium acetate and titanium tetrabutoxide as starting materials. As-deposited thin films were amorphous in structure, the perovskite phase was observed by X-ray diffraction analysis of the thin films heat-treated over 600/spl deg/C.

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9th International Symposium on Electrets (ISE 9) Proceedings

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