热压成型的PMMA高灵敏度电容式微加速度计

2009 IEEE Sensors Pub Date : 2009-10-01 DOI:10.1109/ICSENS.2009.5398397

S. Amaya, D. Dao, S. Sugiyama

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引用次数: 2

摘要

本文首次提出了一种基于热压印和超精密加工的PMMA电容式微加速度计的制作和测试方法。PMMA微加速度计的检测原理基于闭合间隙电容梳。由于传感器是由PMMA聚合物制成的，它将是非常灵活的，高灵敏度和低成本。对PMMA微加速度计进行了测试，获得了0.4pF /G或相当于0.16V/G/V的非常高的灵敏度。

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PMMA high sensitive capacitive micro accelerometer fabricated based on hot embossing

This paper presents for the first time the fabrication and testing of a PMMA capacitive micro accelerometer based on hot embossing and ultra-precision machining. The detection principle of the PMMA micro accelerometer is based on closing-gap capacitive combs. Since the sensor is made of PMMA polymer, it would be very flexible, high sensitive and low cost. The PMMA micro accelerometer was tested and very high sensitivity of 0.4pF /G or equivalent to 0.16V/G/V was obtained.

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2009 IEEE Sensors

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