飞秒激光诱导半导体4H-SiC自有序纳米结构

2010 10th International Conference on Laser and Fiber-Optical Networks Modeling Pub Date : 2010-11-09 DOI:10.1109/LFNM.2010.5624175

V. Makin, R. S. Makin, I. Silantjeva

{"title":"飞秒激光诱导半导体4H-SiC自有序纳米结构","authors":"V. Makin, R. S. Makin, I. Silantjeva","doi":"10.1109/LFNM.2010.5624175","DOIUrl":null,"url":null,"abstract":"The experimental results causing the trench of subwavelength nanostructures formation in semiconductor's 4H-SiC surface and inside volume along the femtosecond beam path are considered. The given qualitative explanation of the observed phenomenon is based on universal polariton model of laser-induced material damage with extension of excitation the cylindrical surface plasmon polaritons and their interference with opposite wave vectors directions following the semiconductor's cylindrical rode metallization.","PeriodicalId":117420,"journal":{"name":"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-11-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Femtosecond laser-induced self-ordered nanostructures in semiconducting 4H-SiC\",\"authors\":\"V. Makin, R. S. Makin, I. Silantjeva\",\"doi\":\"10.1109/LFNM.2010.5624175\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The experimental results causing the trench of subwavelength nanostructures formation in semiconductor's 4H-SiC surface and inside volume along the femtosecond beam path are considered. The given qualitative explanation of the observed phenomenon is based on universal polariton model of laser-induced material damage with extension of excitation the cylindrical surface plasmon polaritons and their interference with opposite wave vectors directions following the semiconductor's cylindrical rode metallization.\",\"PeriodicalId\":117420,\"journal\":{\"name\":\"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-11-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LFNM.2010.5624175\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LFNM.2010.5624175","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

考虑了沿飞秒光束路径在半导体的4H-SiC表面和内部体积中形成亚波长纳米结构沟槽的实验结果。对所观察到的现象的定性解释是基于激光诱导材料损伤的普适极化子模型，该模型是基于激发扩展的圆柱形表面等离子激元极化子及其在半导体圆柱形金属化后与相反波矢量方向的干涉。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Femtosecond laser-induced self-ordered nanostructures in semiconducting 4H-SiC

The experimental results causing the trench of subwavelength nanostructures formation in semiconductor's 4H-SiC surface and inside volume along the femtosecond beam path are considered. The given qualitative explanation of the observed phenomenon is based on universal polariton model of laser-induced material damage with extension of excitation the cylindrical surface plasmon polaritons and their interference with opposite wave vectors directions following the semiconductor's cylindrical rode metallization.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2010 10th International Conference on Laser and Fiber-Optical Networks Modeling

自引率

0.00%

发文量