一种用于高效硅线光互连和波导电路的新型薄型覆盖层点尺寸转换器

2008 5th IEEE International Conference on Group IV Photonics Pub Date : 2008-10-07 DOI:10.1109/GROUP4.2008.4638205

H. Yoshida, T. Sato, K. Ohira, R. Hashimoto, N. Iizuka, M. Ezaki

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引用次数: 5

摘要

我们提出了一种新型的反锥度点尺寸转换器，具有亚微米厚的覆盖层，用于硅基光互连和波导电路。利用这种结构，演示了在绝缘体上硅(SOI)晶圆上的飞结地下通道硅线交叉连接。

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A novel thin-overcladding spot-size converter for efficient silicon-wire optical interconnections and waveguide circuits

We present a novel inverse-taper spot-size converter with submicron-thick overcladding for silicon-based optical interconnections and waveguide circuits. Utilizing this structure, a flying-junction underpass silicon-wire cross-connect on a silicon-on-insulator (SOI) wafer is demonstrated.

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2008 5th IEEE International Conference on Group IV Photonics

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