通过在线机器学习实现自动模印

Constantinos Xanthopoulos, Arnold Neckermann, Paulus List, Klaus-Peter Tschernay, Peter Sarson, Y. Makris
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引用次数: 2

摘要

为了保证现代集成电路(ic)的高可靠性,需要采用几种芯片筛选方法。一种这样的技术,通常被称为模上墨,旨在丢弃可能失效的器件,基于它们与晶圆上已知失效器件的接近程度。传统上,通过肉眼检查每个制造的晶圆,手动进行上墨,因此非常耗时。最近,机器学习已被用于自动化和加速上墨过程。在这项工作中,我们采用在线机器学习来解决当前最先进的自动上墨方法的实用性限制。在手动上墨晶圆的工业数据集上证明了其有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Automated Die Inking through On-line Machine Learning
Ensuring high reliability in modern integrated circuits (ICs) requires the employment of several die screening methodologies. One such technique, commonly referred to as die inking, aims to discard devices that are likely to fail, based on their proximity to known failed devices on the wafer. Die inking is traditionally performed manually by visually inspecting each manufactured wafer and thus it is very time-consuming. Recently, machine learning has been used to automate and speed-up the inking process. In this work, we employ on-line machine learning to address the practicability limitations of the current state-of the-art automated inking approach. Effectiveness is demonstrated on an industrial dataset of manually inked wafers.
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