通过物理严格模拟优化功率器件的自由载流子吸收测量

2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) Pub Date : 2000-09-06 DOI:10.1109/SISPAD.2000.871255

R. Thalhammer, F. Hille, G. Wachutka

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引用次数: 2

摘要

通过自由载流子吸收测量，可以确定功率器件内部的载流子分布。在这项工作中，对整个测量过程进行了物理上严格的模拟，以研究探测光束的波传播和样品制备所产生的影响。给出了优化光学装置和样品几何形状的定量结果，使不可避免的实验误差最小化。

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Optimizing free carrier absorption measurements for power devices by physically rigorous simulation

The carrier distribution in the interior of power devices can be determined from free carrier absorption measurements. In this work, a physically rigorous simulation of the entire measurement process is performed to investigate the effects which arise from the wave propagation of the probing beam and the sample preparation. Quantitative results for optimization of the optical set-up and the sample geometries which minimize the unavoidable experimental errors are presented.

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2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502)

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