Problems and solutions for downsizing CMOS below 0.1 /spl mu/m

Progress of MOS LSI has been achieved by continuous downsizing of its components. However, the downsizing of CMOS devices is now facing severe difficulties at the 0.1 /spl mu/m generation because of various expected limitations. In order to overcome the problems, introduction of new materials and device structures are investigated. This paper explains the difficulties of downsizing CMOS devices below 0.1 /spl mu/m, and then, future CMOS technologies for new materials, processes and structures which are expected to solve the problems.