Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators

Actuators are finding increasing use in the various fields. And, it is one of most important parts for machines because it determines its performance. Actuators account for a large percentage and volume and weight of a product compared with other parts. Therefore, the progress in downsizing of actuators was required. Then, we have proposed a high aspect ratio coil lines for electromagnetic actuators in order to expect to reduce the size and increase the output power. To realize these coils and actuators, we have fabricated a three dimensional X-ray lithography and metallization process. Using these processes, we have formed three-dimensional coil lines with high aspect ratio that could be used in electromagnetic actuators. In this paper, we have fabricated coil lines with 10 mum line width, 20 mum pitch and aspect ratio of 5 on the surface of an acrylic pipe by mean of three-dimensional X-ray lithography technique. And, a void-free metallic deposit could be formed on a thin coil lines by electroplating method. It is very expected the high performance microcoils and actuators with high aspect ratio could be manufactured in spite of the miniature size.