单晶CVD金刚石和SiC探测器在激光等离子体离子发射诊断中的应用

The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems Pub Date : 2012-11-01 DOI:10.1109/ASDAM.2012.6418519

L. Ryć, L. Calcagno, F. Dubecký, D. Margarone, T. Nowak, P. Parys, M. Pfeifer, F. Riesz, L. Torrisi

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引用次数: 2

摘要

本文报道了单晶CVD金刚石和SiC探测器在激光等离子体离子测量中的应用。人们发现探测器大多对快离子和质子敏感。讨论了基于探测器的诊断系统的优化问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Application of single-crystal CVD diamond and SiC detectors for diagnostics of ion emission from laser plasmas

The application of single-crystal CVD diamond and SiC detectors for the measurement of ions generated from laser-produced plasmas is reported. It was found that detectors are mostly sensitive to fast ions and protons. Optimization of the diagnostic system based on the detectors is discussed.

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The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems

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