关于金属/多孔硅/对硅结构并联电阻的测定

A. Dafinei, I. Munteanu, A. Dafinei
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引用次数: 1

摘要

考虑到多孔硅的实际结构,本文提出了在中等电阻pSi衬底上制备多孔硅层的电阻结构模型。考虑到具有分布式元件的电气方案,对PS/Si结构上的电气测量的解释允许确定异质结的分流电阻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
About the determination of the shunt resistance of the metal/porous silicon/p-silicon structures
Considering the real structure of porous silicon the paper proposes a modelling of the electrical resistance structure of a porous silicon layer prepared on moderately resistive pSi substrate. The interpretation of electrical measurements over the PS/Si structure considering an electrical scheme with distributed elements allows determining the shunt resistance of the heterojunction.
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