{"title":"聚合物涂层对OLED气体阻挡用SiNx/SiOx多层阻挡层性能的影响","authors":"Jia-Hao Zhang, Yung-Sheng Wang, J. Liang, D. Wuu","doi":"10.1109/ISNE.2015.7131987","DOIUrl":null,"url":null,"abstract":"A SiN<sub>x</sub>/SiO<sub>x</sub> multi-inorganic barrier shows a low water-vapor transmission rate (WVTR) as the SiN<sub>x</sub>/SiO<sub>x</sub> pairs increased to five pairs. We found that the WVTR can be significantly reduced after coating a polymer overcoat on the barrier with five SiN<sub>x</sub>/SiO<sub>x</sub> pairs. Additionally, the inner residual stress can be obviously reduced with the thickness of the polymer overcoat. We conclude that the improvement of the WVTR is ascribed to the reduction of the inner residual stress after coating a polymer overcoat. A WVTR of 1.28 × 10<sup>-7</sup> (g/m<sup>2</sup>)/day can be achieved after the calcium test time of 1200 hours with a relative humidity of 90% at 60°C.","PeriodicalId":152001,"journal":{"name":"2015 International Symposium on Next-Generation Electronics (ISNE)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Effect of the polymer overcoat on the performance of the SiNx/SiOx multilayer barrier for OLED gas barrier applications\",\"authors\":\"Jia-Hao Zhang, Yung-Sheng Wang, J. Liang, D. Wuu\",\"doi\":\"10.1109/ISNE.2015.7131987\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A SiN<sub>x</sub>/SiO<sub>x</sub> multi-inorganic barrier shows a low water-vapor transmission rate (WVTR) as the SiN<sub>x</sub>/SiO<sub>x</sub> pairs increased to five pairs. We found that the WVTR can be significantly reduced after coating a polymer overcoat on the barrier with five SiN<sub>x</sub>/SiO<sub>x</sub> pairs. Additionally, the inner residual stress can be obviously reduced with the thickness of the polymer overcoat. We conclude that the improvement of the WVTR is ascribed to the reduction of the inner residual stress after coating a polymer overcoat. A WVTR of 1.28 × 10<sup>-7</sup> (g/m<sup>2</sup>)/day can be achieved after the calcium test time of 1200 hours with a relative humidity of 90% at 60°C.\",\"PeriodicalId\":152001,\"journal\":{\"name\":\"2015 International Symposium on Next-Generation Electronics (ISNE)\",\"volume\":\"39 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Symposium on Next-Generation Electronics (ISNE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISNE.2015.7131987\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Symposium on Next-Generation Electronics (ISNE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISNE.2015.7131987","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of the polymer overcoat on the performance of the SiNx/SiOx multilayer barrier for OLED gas barrier applications
A SiNx/SiOx multi-inorganic barrier shows a low water-vapor transmission rate (WVTR) as the SiNx/SiOx pairs increased to five pairs. We found that the WVTR can be significantly reduced after coating a polymer overcoat on the barrier with five SiNx/SiOx pairs. Additionally, the inner residual stress can be obviously reduced with the thickness of the polymer overcoat. We conclude that the improvement of the WVTR is ascribed to the reduction of the inner residual stress after coating a polymer overcoat. A WVTR of 1.28 × 10-7 (g/m2)/day can be achieved after the calcium test time of 1200 hours with a relative humidity of 90% at 60°C.
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