{"title":"VMOS晶体管中寄生电容的最小化","authors":"I. S. Bhatti, T. Rodgers, J. Edwards","doi":"10.1109/IEDM.1976.189107","DOIUrl":null,"url":null,"abstract":"Process techniques for the reduction of parasitic capacitances in VMOS transistors (1) have been developed. Significant reductions in gate to drain overlap capacitance and side wall component of the junction capacitance have been achieved for a high performance VMOS process.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Minimization of parasitic capacitances in VMOS transistors\",\"authors\":\"I. S. Bhatti, T. Rodgers, J. Edwards\",\"doi\":\"10.1109/IEDM.1976.189107\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Process techniques for the reduction of parasitic capacitances in VMOS transistors (1) have been developed. Significant reductions in gate to drain overlap capacitance and side wall component of the junction capacitance have been achieved for a high performance VMOS process.\",\"PeriodicalId\":106190,\"journal\":{\"name\":\"1976 International Electron Devices Meeting\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1976 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1976.189107\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1976 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1976.189107","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Minimization of parasitic capacitances in VMOS transistors
Process techniques for the reduction of parasitic capacitances in VMOS transistors (1) have been developed. Significant reductions in gate to drain overlap capacitance and side wall component of the junction capacitance have been achieved for a high performance VMOS process.