重复功率脉冲作用下功率器件可靠性表征及有限元建模

2013 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2013-04-14 DOI:10.1109/IRPS.2013.6532033

F. Pozzobon, D. Paci, G. Pizzo, A. Buri, S. Morin, F. Carace, A. Andreini, D. Gastaldi, E. Bertarelli, R. Lucchini, P. Vena

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引用次数: 14

摘要

在这项工作中，提出了一种结合实验/数值方法来描述重复功率脉冲下功率器件的热力学行为。采用智能电源BCD技术的功率DMOS采用不同的后端线路(BEOL)方案进行了压力测试，首次包括全铜方案。机械实验室纳米压痕测试已用于确定金属层的组成特性。采用热力学三维有限元模拟方法，对某动力装置及其组件的多周期热载荷进行了模拟。仿真结果与实验结果进行了定性比较。

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Reliability characterization and FEM modeling of power devices under repetitive power pulsing

In this work a combined experimental/numerical approach to describe the thermo-mechanical behavior of power devices under repetitive power pulsing is presented. Stress tests have been carried out on power DMOS implemented in Smart Power BCD technology with different Back-End Of Line (BEOL) schemes, including, for the first time, full Copper. Mechanical laboratory nano-indentation tests have been used to determine constituent properties of the metal layers. Thermo-mechanical 3D FEM modeling has been used to simulate a multi-cycle thermal loading of a whole power device with its package. Results from simulation have been qualitatively compared to experimental results.

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2013 IEEE International Reliability Physics Symposium (IRPS)

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