Os-Ru涂层对m型阴极封闭空间二极管试验的影响

P. Swartzentruber, T. Balk, S. Roberts
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引用次数: 4

摘要

对m型分配器阴极进行了1000小时的寿命测试,以帮助量化不同锇钌(Os-Ru)薄膜微观结构对性能的增强。Os-Ru薄膜微观结构的选择是基于其抑制钨/Os-Ru相互扩散的潜力,正如之前的研究所发现的那样。结果表明,10W衬底偏置150nm厚薄膜在其寿命期间产生了非常稳定的膝部温度。然而,与标准Semicon薄膜相比,膝关节温度较高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of Os-Ru coating on closed-space diode tests of M-Type dispenser cathodes
Life testing of M-Type dispenser cathodes was performed for 1000 hours to help quantify the performance enhancement due to different osmium-ruthenium (Os-Ru) thin film microstructures. Os-Ru film microstructures were selected based on their potential to inhibit tungsten/Os-Ru interdiffusion as identified in previous studies. The results show that the 10W substrate biased 150nm thick film yielded a very stable knee temperature throughout its life. However, the knee temperature was high in comparison to the standard Semicon film.
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