用于未来通信系统的可调谐射频MEMS微电感器

Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678) Pub Date : 2003-11-17 DOI:10.1109/IMOC.2003.1244918

C. Tassetti, G. Lissorgues, J. Gilles

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引用次数: 12

摘要

可调microinductors;可设计控制磁耦合系数。本文介绍了一种新型可调谐射频MEMS微电感器的设计与制作。该元件需要静电致动器来控制电感值。我们报告了在测试晶圆上从1.5 ghz到5GHz测量的50%电感变化。简要介绍了一种计算机械位移引起的电感变化的方法。基于几何结构的紧凑集总单元模型与射频频率范围内的测量结果非常吻合。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Tunable RF MEMS microinductors for future communication systems

Tunable microinductors; can be designed controlling the magnetic coupling coefficient. This paper presents the design and fabrication of a new tunable RF MEMS microinductor. This component requires electrostatic actuators to control the inductance value. We report a 50% inductance variation from 1.5 to 5GHz measured on test wafers. A method to compute the inductance variation due to the mechanical displacement is briefly described. A compact lumped element model, based on the geometry, gives results in good agreement with measurements in the RF frequency range.

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来源期刊

Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678)

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