用庞加莱映射模拟MEMS悬臂梁的非线性动力学和混沌

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1216959

S. Liu, A. Davidson, Q. Lin

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引用次数: 22

摘要

我们使用庞加莱映射来发现和表征周期性强制的非线性动力学和混沌，静电驱动的MEMS悬臂用于基于探针的数据存储芯片。结果表明，在激励参数空间中存在明显的混沌区域，这是标准simulink类型的悬臂梁开环和闭环控制仿真所没有的。在一种情况下，由于混沌响应，稳定运行范围减小了25%。我们还发现了低增益下闭环的双稳定区域。

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Simulating nonlinear dynamics and chaos in a MEMS cantilever using poincare mapping

We have used Poincare mapping to find and characterize nonlinear dynamics and chaos in a periodically forced, electrostatically actuated MEMS cantilever intended for a probe-based data storage chip. The results show significant chaotic regions in the excitation parameter space that would not be found with standard Simulink-type simulations for both open and closed loop control of the cantilever. For one case the stable operation range is reduced by 25% because of a chaotic response. We have also found a region of bi-stability for the closed loop at low gain.

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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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