具有低精细度半球形微腔读出的光子MEMS加速度计

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051490

Y. Bao, F. Zhou, T. Lebrun, J. Gorman

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引用次数: 2

摘要

本文描述了一种光子MEMS加速度计的设计、制造和测试，该加速度计使用半球形微腔来传递证明质量的运动。腔体设计提供稳定的操作，相对耐受不对准误差。该原型传感器显示出与期望的Airy函数模型密切匹配的光学共振。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A photonic MEMS accelerometer with a low-finesse hemispherical microcavity readout

This paper describes the design, fabrication, and testing of a photonic MEMS accelerometer that uses a hemispherical microcavity to transduce the motion of the proof mass. The cavity design provides stable operation that is relatively tolerant of misalignment errors. The prototype sensor is shown to have optical resonances that closely match the expected Airy function model.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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