Digital optimeter based on linear CCD

In this paper, the development of a new type of digital optimeter based on linear CCD is introduced and discussed. It is based on traditional autocollimation optical system and optical lever motion, with linear CCD as measuring element. A light band generated by slit is captured by linear CCD after passing through an autocollimation optical system. A piece of mirror placed in the optical path of this system is controlled by displacement of a measuring slide in order to adjust the light band imaging position. The displacement of light band is detected by CCD and is then displayed in digital format. Such a design successfully eliminates the existing issues of signal quality and signal overspeed in digital optimeters using grating as the measuring element. The final product based on this technique has been released, offering a resolution of 0.1μm and 0.02μm.