基于GO/SiO2/128°YX-LiNbO3结构的瑞利波传感器有限元建模

2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) Pub Date : 2019-11-01 DOI:10.1109/SPAWDA48812.2019.9019330

Yan Wang, Xiao-qing Liu, Shu-lin Shang, Xun Xu

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引用次数: 1

摘要

采用三维有限元法(3D-FEM)研究了基于GO(氧化石墨烯)/SiO2/IDT(数字间传感器)/128°YX-LiNbO3结构的瑞利波器件的特性，包括相速度vp、机电耦合系数k2和气敏性能。结果表明，氧化石墨烯层改善了瑞利波器件的特性，即引入氧化石墨烯膜后，vp和k2均有所提高。当hs/λ=0.01, hGO=0.5μm时，相速度为4517m/s, k2为9.32%，高于无GO瑞利波器件。同时，氧化石墨烯层也提高了rayleigh波传感器的气敏灵敏度。因此，氧化石墨烯是构建SAW传感器的理想材料，具有广泛的应用前景。

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Fem Modeling Rayleigh Wave Sensors Based on GO/SiO2/128° YX-LiNbO3 Structures

3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO2/IDT(inter-digital transducer)/128° YX-LiNbO3 structures, including the phase velocity vp, electromechanical coupling coefficient k², and gas sensing properties. The results show that the GO layersimprove the characteristics of the Rayleigh wave devices, that is, vp andk² are increased by the introduction of GO films. And thek²of 9.32% associated with phase velocity of 4517m/s have obtained as hs/λ=0.01 and hGO=0.5μm, which are higher than that of GO free Rayleigh wave device. Meanwhile, the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers. Therefore, GO is an ideal material for constructing SAW sensors for widespread applications.

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2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)

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