高温应力后焊料空洞形成机理的三维CT扫描和EDX分析

Lai Chin Yung, Ho Ing Hong, Eric Wong Soon Kiong, C. C. Fei
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引用次数: 0

摘要

近年来,通过在封装内应用铜柱凸点作为互连器的倒装芯片封装,通过保持或最大化芯片应用功能,成功地将封装尺寸缩小到最小水平。然而,在铜柱与衬底之间的焊点连接形成过程中,观察到一些弱点。最常见的缺陷是在焊点区域形成焊料空洞,这将降低焊点的互连强度或坚固性。为了解焊点空洞形成机理,采用镀铜和镀银铅垫衬底进行了不同应力时间间隔下柱状焊点形成过程的模拟实验。利用三维ct扫描技术对亚微米尺寸的钎料空洞缺陷进行了分析分析,特别是在高温应力过程中。利用能量色散x射线进行元素分析,证明了衬底衬垫材料在焊点形成过程中的溶解机理。通过实验发现并深入了解材料在封装概念中的溶解行为,可以保证柱接模结合工艺更加坚固,保证封装质量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation on Solder Void Formation Mechanism After High Temperatures Stress by 3D CT Scan and EDX Analysis
In recent years, flip chip packaging by application of a copper pillar bump as an interconnector within the packages has successfully shrunk the package size to a minimum level, by maintaining or maximizing the chip application functionality. Nevertheless, some weaknesses have been observed during the formation of solder joint connection between the copper pillars to die pad substrates. The most common defect, which is solder void formation at the solder joint area, will reduce the interconnection strength or robustness of the solder joint. To understand the solder void formation mechanism, a simulation experiment has been carried out by using copper and silver plated lead pad substrate for pillar solder joint formation process at different stress time interval. An analytical analysis by using 3D CT-scan has been carried out to detect the submicron size solder void defect, especially during high-temperature stress process. An elemental analysis by energy dispersive X-ray also has been carrying out to prove the substrate pad material dissolution mechanism during solder joint formation. With the experiment finding and deeply understanding the material dissolution behavior in packaging concept, this can ensure more robust pillar joint die bond process and guarantee quality packages built.
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