微驱动装置微位移自感知测试系统研究

2011 3rd International Workshop on Intelligent Systems and Applications Pub Date : 2011-05-28 DOI:10.1109/ISA.2011.5873280

Zhen Yu, Yi-bin He, Jie Mei, Hui Zheng, Dingfang Chen

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引用次数: 0

摘要

在微加工设备的研究中，利用gmm驱动的微进给装置可以实现微位移进给，基于弹性板的弹性微应变与装置微位移之间的变形原理，设计了一种基于LabVIEW的微位移自感知传感器系统。研究表明，微位移自传感系统可以实现微位移信号的采集。

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Research of Micro-Displacement Self-Sensing Testing System for Micro-Driving Device

In the study of micro-processing equipment, the use of GMM-driven micro-feed device can realize the micro-displacement feed, Based on the principle of elastic plate deformation between its elastic micro-strain and the device's micro-displacement, a micro-displacement self-sensing sensor systems based on LabVIEW is designed.Research shows that the micro-displacement self-sensing system can achieve the micro-displacement signal acquisition.

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2011 3rd International Workshop on Intelligent Systems and Applications

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