硅谐振腔增强型紫外火焰探测器

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003184

Z. Djuric, K. Radulović, N. Trbojevic, A. Lazic

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引用次数: 7

摘要

对选择性敏感紫外探测器的需求既要求新的探测器结构，也要求新的材料和技术来生产它们。在本文中，我们首次考虑了用硅吸收层的谐振腔增强探测器结构来提高紫外探测器的选择性和速度的可能性。特别强调了用于火焰探测的紫外光电探测器。

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Silicon resonant cavity enhanced UV flame detector

The need for selectively sensitive UV photodetectors poses a requirement both for novel detector structures and for new materials and technologies to produce them. In this paper we consider, for the first time, a possibility to use resonant cavity enhanced detector structures with a silicon absorption layer to increase selectivity and speed of UV detectors. A special emphasis is given to the UV photodetectors used in flame detection.

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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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