研究了铜靶离子束溅射沉积在陶瓷衬底上的PCR芯片的热性能

Kuiwei Qin, Qiaorui Xing, Xuefei Lv, Di Zhou, Rui Li, Yulin Deng
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引用次数: 0

摘要

本研究采用铜靶离子束溅射沉积(CTIBSD)方法提高了商用陶瓷衬垫的热性能,并利用紫外软光刻技术在几分钟内制作了多个NOA81 PCR芯片。利用Comsol软件模拟了铜涂层的热均匀性和传热速率,考察了铜涂层的改善效果。此外,采用线平均测温法测量了不同铜膜厚度的衬底上的热分布。并根据PCR程序测试了铜珀尔帖PCR芯片的冷却速度。模拟和测试结果表明,CTIBSD方法可以极大地提高Peltier的热性能,并且可以通过提高传热速率来缩短PCR芯片的PCR时间。在铜箔支撑热源的PCR芯片上成功地实现了基因扩增的实际应用。新型NOA81芯片具有铜珀尔帖优异的热性能,未来可应用于POCT (Point of care testing)和法医分析领域。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The thermal performance of PCR chip with copper target ion beam sputtering deposition on the ceramic peltier
In this study, the copper target ion beam sputtering deposition (CTIBSD) method was used for improving the thermal performance of commercial ceramic peltier and several PCR chips were made of NOA81 in few minutes by UV soft lithography technology. The thermal uniformity and heat transfer rate were simulated by Comsol to investigate the improved effect of coppering peltier. In addition, the thermal distribution on the peltiers with different thickness copper film were measured through the line average temperature measuring method. The cooling rate of the PCR chip with coppering Peltier also was tested according to the PCR program. The results of the simulation and measurement showed that the CTIBSD method could greatly improve the thermal performance of Peltier and the PCR time of the PCR chip could be reduced by the increasing of the heat transfer rate. An practical application in gene amplification was realized successfully on the PCR chip which the heat resource supporting by the coppering Peltier. With the excellent thermal performance of coppering Peltier, the novel NOA81 chip could apply in field of POCT (Point of care testing) and forensic analysis in the future.
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