连续离子层吸附反应制备纳米ZnO薄膜的结构和光学性质

E. E. El Hamri, A. Elfanaoui, L. Boulkadat, E. Ihalane, L. Alahyane, H. Kirou, K. Bouabid, A. Ihlal, L. Laânab
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引用次数: 1

摘要

本文报道了用连续离子层吸附反应(SILAR)法制备氧化锌(ZnO)薄膜的方法。所有的沉积都是在室温下在廉价的玻璃基板上进行的。研究了退火温度和薄膜厚度对薄膜结构、形貌和光学性能的影响。将沉积膜在300℃和400℃下在氧气气氛下退火1 h。x射线衍射(XRD)和扫描电镜(SEM)表征表明,薄膜覆盖了整个玻璃基底,呈现纤锌矿六方结构。所有的薄膜都是纳米结构的。研究了薄膜厚度对带隙值的影响,发现带隙值随生长条件的不同在3.2 ~ 3.8 eV范围内变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural and optical properties of the nanocrystalline ZnO films prepared by Successive Ionic Layer Adsorption and Reaction
In this paper, we report on Zinc oxide (ZnO) thin films grown by means of simple and cost effective method: Successive Ionic Layer Adsorption and Reaction (SILAR). All the depositions were performed on cheap glass substrates at room temperature. Annealing temperatures and film thickness effect on the structural, morphological and optical properties of the films were investigated. The as-deposited films were annealed at 300 and 400°C for 1 h under oxygen atmosphere. The X-ray diffraction (XRD) and scanning electron microscopy (SEM) characterizations showed that the films covered the whole glass substrates and exhibit the wurtzite hexagonal structure. All the films are nanostructured. The film thickness effect on the band gap values was investigated and band gap values were found to vary within the range 3.2 - 3.8 eV depending on the growth conditions.
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