用于高强度聚焦超声应用的CMUT细胞设计

2022 IEEE International Conference of Electron Devices Society Kolkata Chapter (EDKCON) Pub Date : 2022-11-26 DOI:10.1109/EDKCON56221.2022.10032962

A. Ray, S. Sinha, F. Haque

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引用次数: 0

摘要

制造技术的进步导致了基于MEMS的电容式微机械超声换能器(CMUT)器件的重大发展，该器件具有多种超声应用。这项工作讨论了cmut的建模和仿真，以使用COMSOL®Multiphysics获得适合HIFU应用的超声频率。可用于基于导管的人体病变组织消融监测。多晶硅和二氧化硅被用作顶膜。底部膜是由硅制成的圆形CMUT电池。我们对CMUT装置进行了本征频率研究和拉入电压检查。分析计算使用MATLAB®进行。

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Design of CMUT Cells for High-intensity Focused Ultrasound Applications

The advancements in fabrication technology have led to significant developments in MEMS -based capacitive micromachined ultrasonic transducer (CMUT) devices, which have several ultrasound applications. This work discusses the modeling and simulation of CMUTs to derive ultrasound frequencies suitable for HIFU applications using COMSOL® Multiphysics. It can be used for catheter-based monitoring of diseased tissues ablation in the human body. Polysilicon and SiO2 have been used for the top membrane. The bottom membrane is made of silicon for the circular CMUT cell. We performed eigen-frequency studies and pull-in voltage inspection of the CMUT device. The analytical calculations are performed using MATLAB®.

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2022 IEEE International Conference of Electron Devices Society Kolkata Chapter (EDKCON)

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