A. V. Kamanin, I. Mokina, N. Shmidt, L. A. Busygina, T. A. Yurre
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Polymer diffusants in III-V semiconductor compounds technology
A Zn diffusion technique into III-V compounds from polymer spin-on films has been devised that allows to retain the initial surface morphology without any additional operations. This essentially simplifies the process. Moreover, the method provides a high portion (about 100%) of the electrically active Zn at N/sub Zn/
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